Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6942265 | Apparatus comprising a flexible vacuum seal pad structure capable of retaining non-planar substrates thereto | Eric Johanson | 2005-09-13 |
| 6305565 | Transport chamber and method for making same | Eric A. Terbeek | 2001-10-23 |
| 6216328 | Transport chamber and method for making same | Eric A. Terbeek | 2001-04-17 |
| 6010133 | Chamber interfacing O-rings and method for implementing same | Richard D. Beer, Eric A. Terbeek, Vernon Wong | 2000-01-04 |
| 5746434 | Chamber interfacing O-rings and method for implementing same | Richard D. Beer, Eric A. Terbeek, Vernon Wong | 1998-05-05 |
| 5667197 | Vacuum chamber gate valve and method for making same | Martin F. Yeoman | 1997-09-16 |
| 5511608 | Clampless vacuum heat transfer station | — | 1996-04-30 |