Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838216 | Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus | Mario Hennig, Jurgen Knobloch, Rainer Pforr, Manuel Vorwerk | 2005-01-04 |
| 6835506 | Method for producing a photomask and corresponding photomask | — | 2004-12-28 |
| 6660437 | Alternating phase mask | Christoph Friedrich, Michael Heissmeier, Burkhard Ludwig, Molela Moukara, Rainer Pforr | 2003-12-09 |
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Christoph Friedrich, Rainer Pforr, Dietrich Widmann, Andreas Grassmann | 2003-10-21 |
| 6466373 | Trimming mask with semitransparent phase-shifting regions | Rainer Pforr, Christoph Friedrich, Klaus Ergenzinger, Fritz Gans, Wilhelm Maurer +1 more | 2002-10-15 |