Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573493 | Inductively coupled plasma apparatus | Valentin N. Todorow, Samer Banna, Ankur Agarwal, Zhigang Chen, Andrew Nguyen +2 more | 2020-02-25 |
| 8492980 | Methods for calibrating RF power applied to a plurality of RF coils in a plasma processing system | Samer Banna, Valentin N. Todorow, Xing Lin | 2013-07-23 |