Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4489241 | Exposure method with electron beam exposure apparatus | Tadahito Matsuda, Susumu Ozasa, Norio Saitou, Haruo Yoda | 1984-12-18 |
| 4443703 | Method and apparatus of deflection calibration for a charged particle beam exposure apparatus | Nobuo Shimazu, Norio Saitou, Susumu Ozasa | 1984-04-17 |
| 4336597 | Method and system for measuring the diameter of an electron beam | Yasuo Kato, Genya Matsuoka | 1982-06-22 |
| 4286154 | Method of detecting a mark by an electron beam and an apparatus therefor | Nobuo Hamamoto, Kazuo Ichino | 1981-08-25 |