| 6617097 |
Exposure method |
Yasunori Nishimura, Taimi Oketani |
2003-09-09 |
| 6496249 |
Exposure apparatus |
Yasunori Nishimura, Taimi Oketani |
2002-12-17 |
| 6479832 |
Surface height detecting apparatus and exposure apparatus using the same |
Kazuhiko Hori |
2002-11-12 |
| RE37361 |
Scanning type exposure apparatus and exposure method |
Masamitsu Yanagihara, Susumu Mori, Masami Seki, Seiji Miyazaki, Tsuyohsi Narabe +1 more |
2001-09-11 |
| 6239861 |
Exposure method and scanning type exposure apparatus |
Kei Nara |
2001-05-29 |
| 6134007 |
Method for measuring orthogonality having a third interferometer which is not orthogonal |
Shuji Kawamura |
2000-10-17 |
| 5995225 |
Method for measuring orthogonality in a stage of an exposure apparatus |
Shuji Kawamura |
1999-11-30 |
| 5668624 |
Scan type exposure apparatus |
Kei Nara |
1997-09-16 |
| 5625436 |
Scanning type exposure apparatus and exposure method |
Masamitsu Yanagihara, Susumu Mori, Masami Seki, Seiji Miyazaki, Tsuyoshi Narabe +1 more |
1997-04-29 |
| 5581075 |
Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area |
Masamitsu Yanagihara, Hiroshi Shirasu, Tomohide Hamada, Tetsuo Kikuchi, Noriaki Yamamoto |
1996-12-03 |
| 5579147 |
Scanning light exposure apparatus |
Susumu Mori |
1996-11-26 |
| 5207505 |
Illumination light source device |
Haruo Ozawa, Takashi Mori, Jun Nagatsuka |
1993-05-04 |
| 4655584 |
Substrate positioning apparatus |
Hiroshi Tanaka, Yukio Kakizaki, Hiromitsu Iwata |
1987-04-07 |
