Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411075 | Optical sensor window cleaner | — | 2025-09-09 |
| 9666456 | Method and apparatus for treating a workpiece with arrays of nozzles | Jimmy D. Collins, David DeKraker, Alan D. Rose | 2017-05-30 |
| 9039840 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Jimmy D. Collins, Alan D. Rose | 2015-05-26 |
| 8978675 | Method and apparatus for treating a workpiece with arrays of nozzles | Jimmy D. Collins, David DeKraker, Alan D. Rose | 2015-03-17 |
| 8967167 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Jimmy D. Collins, David DeKraker, Alan D. Rose | 2015-03-03 |
| 8684015 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Jimmy D. Collins, Alan D. Rose | 2014-04-01 |
| 8668778 | Method of removing liquid from a barrier structure | Jimmy D. Collins, David DeKraker, Alan D. Rose | 2014-03-11 |
| 8387635 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Jimmy D. Collins, David DeKraker, Alan D. Rose | 2013-03-05 |
| 8235062 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Jimmy D. Collins, Alan D. Rose | 2012-08-07 |
| 8070884 | Methods for rinsing microelectronic substrates utilizing cool rinse fluid within a gas enviroment including a drying enhancement substance | — | 2011-12-06 |
| 7913706 | Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses | David DeKraker, Jimmy D. Collins, Alan D. Rose, Richard E. Williamson | 2011-03-29 |
| 7244315 | Microelectronic device drying devices and techniques | Stephen C. Loper, Thomas J. Wagener | 2007-07-17 |
| 6845779 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Tim Herbst, Todd Maciej, Thomas J. Wagener, Kevin L. Siefering | 2005-01-25 |