Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6033479 | Process gas delivery system for CVD having a cleaning subsystem | — | 2000-03-07 |
| 5819683 | Trap apparatus | Takashi Horiuchi | 1998-10-13 |
| 5730804 | Process gas supply apparatus | Hisashi Gomi, Masahide Itoh, Shimpei Jinnouchi | 1998-03-24 |
| 5676757 | Decompression container | Katsumi Ishii, Yoji IIZUKA | 1997-10-14 |
| 5520142 | Decompression container | Katsumi Ishii, Yoji IIZUKA | 1996-05-28 |
| 5455082 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Nobuo Ishii, Hiroaki Saeki | 1995-10-03 |
| 5433780 | Vacuum processing apparatus and exhaust system that prevents particle contamination | Teruo Iwata | 1995-07-18 |
| 5426865 | Vacuum creating method and apparatus | Teruo Iwata | 1995-06-27 |
| 5314541 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Nobuo Ishii, Hiroaki Saeki | 1994-05-24 |
| 5240556 | Surface-heating apparatus and surface-treating method | Yoshio Ishikawa, Junichi Arami, Teruo Iwata | 1993-08-31 |
| 5198755 | Probe apparatus | Teruo Iwata, Issei Imahashi | 1993-03-30 |
| 5091694 | Quartz probe apparatus | Hisashi Koike | 1992-02-25 |
| 5061894 | Probe device | — | 1991-10-29 |
| 4998062 | Probe device having micro-strip line structure | — | 1991-03-05 |