| 11965263 |
Substrate holding and locking system for chemical and/or electrolytic surface treatment |
Herbert Ötzlinger, Oliver Knoll, Raoul Schröder, Markus Gersdorff, Georg Hofer +1 more |
2024-04-23 |
| 11908698 |
Method and device for plating a recess in a substrate |
Franz Markut, Oliver Knoll, Andreas Gleissner, Harald Okorn-Schmidt, Philipp Engesser |
2024-02-20 |
| 11566337 |
Substrate locking system, device and procedure for chemical and/or electrolytic surface treatment |
Andreas Gleissner, Herbert Ötzlinger |
2023-01-31 |
| 11195730 |
Method and apparatus for processing wafer-shaped articles |
Rainer Obweger, Andreas Gleissner, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more |
2021-12-07 |
| 11164748 |
Method and device for plating a recess in a substrate |
Franz Markut, Oliver Knoll, Andreas Gleissner, Harald Okorn-Schmidt, Philipp Engesser |
2021-11-02 |
| 10490426 |
Method and apparatus for processing wafer-shaped articles |
Rainer Obweger, Andreas Gleissner, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more |
2019-11-26 |
| 10269615 |
Apparatus for treating surfaces of wafer-shaped articles |
Ulrich Tschinderle, Andreas Gleissner, Rainer Obweger |
2019-04-23 |
| 10056287 |
Apparatus for treating surfaces of wafer-shaped articles |
Ulrich Tschinderle, Andreas Gleissner, Rainer Obweger |
2018-08-21 |
| 9887120 |
Apparatus for treating surfaces of wafer-shaped articles |
Andreas Gleissner, Michael Brugger |
2018-02-06 |
| 9653328 |
Method and apparatus for surface treatment using inorganic acid and ozone |
Harald Okorn-Schmidt, Franz Kumning, Rainer Obweger |
2017-05-16 |
| 9633890 |
Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device |
Ulrich Tschinderle, Andreas Gleissner, Franz Kumnig, Rainer Obweger |
2017-04-25 |
| 9418883 |
Device for holding wafer shaped articles |
Andreas Gleissner |
2016-08-16 |
| 9044794 |
Ultrasonic cleaning fluid, method and apparatus |
Frank Holsteyns, Alexander R. Lippert |
2015-06-02 |
| 8833380 |
Device for treating disc-like articles |
Rainer Obweger, Franz Kumnig |
2014-09-16 |
| 8709165 |
Method and apparatus for surface treatment using inorganic acid and ozone |
Harald Okorn-Schmidt, Franz Kumning, Rainer Obweger |
2014-04-29 |
| 8646767 |
Device for holding wafer shaped articles |
Franz Kumnig, Rainer Obweger |
2014-02-11 |
| 8490634 |
Device for treating disc-like articles |
Rainer Obweger, Franz Kumnig |
2013-07-23 |
