Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7600747 | Platen for cut sheet feeder | Kevin Herde, Egbert Most, Rebecca J. Anderson, Charles C. Fuller | 2009-10-13 |
| 7516950 | Cut sheet feeder | Kevin Herde, Egbert Most, Rebecca J. Anderson, Charles C. Fuller | 2009-04-14 |
| 7479458 | Methods and apparatus for the optimization of highly selective process gases | Guang-Yaw Hwang, Wen-Ben Chou, Timothy Tran, Yu-Wei Yang | 2009-01-20 |
| 6899109 | Method and apparatus for reducing He backside faults during wafer processing | — | 2005-05-31 |
| 6733594 | Method and apparatus for reducing He backside faults during wafer processing | — | 2004-05-11 |
| 6410451 | Techniques for improving etching in a plasma processing chamber | George Mueller, Peter Thomas McGrath | 2002-06-25 |
| 6217786 | Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry | Graham W. Hills, Douglas Keil, Keyvan Khajehnouri | 2001-04-17 |
| 6117786 | Method for etching silicon dioxide using fluorocarbon gas chemistry | Keyvan Khajehnouri, George Mueller | 2000-09-12 |
| 6090304 | Methods for selective plasma etch | Helen Zhu, George Mueller, Lumin Li | 2000-07-18 |