Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506685 | Perforated plasma confinement ring in plasma reactors | Lumin Li | 2003-01-14 |
| 6410451 | Techniques for improving etching in a plasma processing chamber | Thomas D. Nguyen, Peter Thomas McGrath | 2002-06-25 |
| 6178919 | Perforated plasma confinement ring in plasma reactors | Lumin Li | 2001-01-30 |
| 6117786 | Method for etching silicon dioxide using fluorocarbon gas chemistry | Keyvan Khajehnouri, Thomas D. Nguyen | 2000-09-12 |
| 6090304 | Methods for selective plasma etch | Helen Zhu, Thomas D. Nguyen, Lumin Li | 2000-07-18 |