Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9209245 | Semiconductor device having plural patterns extending in the same direction | — | 2015-12-08 |
| 8994151 | Semiconductor device having plural patterns extending in the same direction | — | 2015-03-31 |
| 7955761 | Exposure mask, pattern formation method, and exposure mask fabrication method | — | 2011-06-07 |
| 7923179 | Exposure mask and pattern forming method therefor | — | 2011-04-12 |
| 7910266 | Pattern forming method and mask | — | 2011-03-22 |
| 7810066 | Irradiation pattern data generation method, mask fabrication method, and plotting system | — | 2010-10-05 |
| 7691543 | Mask data creation method | — | 2010-04-06 |
| 7681173 | Mask data generation method and mask | Nobue Kosa | 2010-03-16 |
| 7632614 | Circuit pattern exposure method and mask | Nobue Kosa | 2009-12-15 |
| 6355382 | Photomask and exposure method using a photomask | Shinji Ishida | 2002-03-12 |
| 6150059 | Photomask and method of exposure using same | Hiroyoshi Tanabe, Shinji Ishida | 2000-11-21 |
| 6004699 | Photomask used for projection exposure with phase shifted auxiliary pattern | Shinji Ishida | 1999-12-21 |
| 5935738 | Phase-shifting mask, exposure method and method for measuring amount of spherical aberration | Shinji Ishida | 1999-08-10 |
| 5908718 | Phase shifting photomask with two different transparent regions | Shinji Ishida | 1999-06-01 |
| 5827623 | Optical proximity correction halftone type phase shift photomask | Shinji Ishida | 1998-10-27 |
| 5792596 | Pattern forming method | Shinji Ishida, Kunihiko Kasama, Yoko Iwabuchi | 1998-08-11 |
| 5750290 | Photo mask and fabrication process therefor | Shinji Ishida | 1998-05-12 |
| 5644390 | Intensity distribution simulating method | — | 1997-07-01 |
| 5636005 | Optical projection aligner equipped with rotatable fly-eye lens unit | — | 1997-06-03 |
| 5619304 | Reduction exposure apparatus with improved resolution characteristic and raised light intensity | — | 1997-04-08 |
| 5532497 | Optical aligner equipped with luminance sensor on movable stage | Hiroshi Nozue, Seiichi Shiraki | 1996-07-02 |
| 5439767 | Phase shift mask and its inspection method | Hiroshi Yamashita | 1995-08-08 |
| 5060843 | Process of forming bump on electrode of semiconductor chip and apparatus used therefor | Keizo Sakurai | 1991-10-29 |