Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531409 | Fluorine containing carbon film and method for depositing same | — | 2003-03-11 |
| 5792596 | Pattern forming method | Tadao Yasuzato, Shinji Ishida, Kunihiko Kasama | 1998-08-11 |