Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5532497 | Optical aligner equipped with luminance sensor on movable stage | Tadao Yasuzato, Hiroshi Nozue | 1996-07-02 |
| 5498877 | Method of manufacturing semiconductor device using measurement mark pattern | — | 1996-03-12 |