Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7589335 | Charged-particle beam pattern writing method and apparatus and software program for use therein | Takuya Matsukawa, Shuichiro Fukutome, Tomoyuki Horiuchi, Hayato Kimura, Kiyoshi Hattori | 2009-09-15 |
| 7476881 | Charged beam drawing apparatus and charged beam drawing method | Kiyoshi Hattori, Kenji Ohtoshi, Tomohiro Iijima, Yoshiaki Onimaru, Hayato Kimura | 2009-01-13 |