Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209623 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya | 2019-02-19 |
| 9927713 | Surface position detection apparatus, exposure apparatus, and exposure method | Yasuhiro Hidaka | 2018-03-27 |
| 9519223 | Surface position detection apparatus, exposure apparatus, and exposure method | Yasuhiro Hidaka | 2016-12-13 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya | 2016-07-05 |
| 9069261 | Surface position detection apparatus, exposure apparatus, and exposure method | Yasuhiro Hidaka | 2015-06-30 |
| 9063438 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya | 2015-06-23 |
| 8384875 | Exposure apparatus, exposure method, and method for producing device | Yasuhiro Hidaka, Tohru Kiuchi | 2013-02-26 |
| 8149382 | Surface position detection apparatus, exposure apparatus, and exposure method | Yasuhiro Hidaka | 2012-04-03 |
| 8130361 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya, Kenichi Shiraishi | 2012-03-06 |
| 5872618 | Projection exposure apparatus | Yuuki Ishii, Masahiro Nei, Tohru Kiuchi | 1999-02-16 |
| 5797674 | Illumination optical system, alignment apparatus, and projection exposure apparatus using the same | — | 1998-08-25 |
| 5798838 | Projection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the same | Tetsuo Taniguchi, Toshihiko Tsuji | 1998-08-25 |
| 5754299 | Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus | Ayako Sugaya, Masahiro Nakagawa | 1998-05-19 |
| 5680200 | Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus | Ayako Sugaya, Masahiro Nakagawa | 1997-10-21 |
| 5552892 | Illumination optical system, alignment apparatus, and projection exposure apparatus using the same | — | 1996-09-03 |