Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387952 | Substrate processing method including thickness monitoring | Takashi Ota, Takao Itahara, Kyohei Nakanishi, Tatsuya SHIMANO | 2025-08-12 |
| 12176215 | Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium | Toru Edo, Kensuke Shinohara | 2024-12-24 |
| 12080566 | Substrate treating apparatus and substrate treating method | Takashi Ota, Mitsukazu Takahashi, Kazuhiro Honsho, Yusuke Akizuki | 2024-09-03 |
| 11569085 | Substrate processing method and substrate processing device | Sadamu Fujii | 2023-01-31 |
| 11437229 | Substrate processing method | Pohling THEN, Kenji Kobayashi, Sadamu Fujii | 2022-09-06 |
| 10854469 | Substrate processing method and substrate processing apparatus | — | 2020-12-01 |
| 10790134 | Substrate processing method | Takashi Ota | 2020-09-29 |
| 10784126 | Substrate processing method and substrate processing apparatus | Sadamu Fujii | 2020-09-22 |
| 10727043 | Substrate processing method and substrate processing apparatus | Sadamu Fujii | 2020-07-28 |
| 10699895 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-06-30 |
| 10685829 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-06-16 |
| 10672627 | Substrate processing method and substrate processing apparatus | Sadamu Fujii, Nobuyuki Shibayama | 2020-06-02 |
| 10593569 | Substrate processing method | Sadamu Fujii, Rei TAKEAKI | 2020-03-17 |
| 10586695 | Substrate processing method and substrate processing device | Takashi Ota | 2020-03-10 |
| 10580668 | Substrate processing apparatus and substrate processing method using substrate processing apparatus | Takashi Ota, Kazuhide Saito, Kunio Yamada | 2020-03-03 |
| 10211063 | Substrate processing apparatus and substrate processing method | Takashi Ota, Kazuhide Saito, Toshimitsu NAMBA, Yasukatsu Kamihiro | 2019-02-19 |
| 9899229 | Substrate processing apparatus | Takashi Ota, Naoki Fujiwara | 2018-02-20 |
| 9543162 | Substrate processing method | Takashi Ota, Kazuhide Saito | 2017-01-10 |
| 9431277 | Substrate treatment method and substrate treatment apparatus | Takashi Ota, Kazuhide Saito | 2016-08-30 |
| 9364873 | Substrate treatment method and substrate treatment apparatus | Akio Hashizume, Takashi Ota | 2016-06-14 |