Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11669020 | Method and apparatus for pattern fidelity control | Vivek Jain, Stefan Hunsche, Bruno La Fontaine | 2023-06-06 |
| 11029614 | Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus | Wim Tjibbo Tel, Frank Staals, Martin Jules Marie-Emile De Nivelle | 2021-06-08 |
| 10908515 | Method and apparatus for pattern fidelity control | Vivek Jain, Stefan Hunsche, Bruno La Fontaine | 2021-02-02 |