Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6193813 | Utilization of SiH4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Klaus-Dieter Rinnen, Moshe Eizenberg | 2001-02-27 |
| 5817576 | Utilization of SiH.sub.4 soak and purge in deposition processes | Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Klaus-Dieter Rinnen, Moshe Eizenberg | 1998-10-06 |
| 5780360 | Purge in silicide deposition processes dichlorosilane | Jennifer Meng Chu Tseng, Mei Chang, Ramanujapuram A. Srinivas, Klaus-Dieter Rinnen, Moshe Eizenberg | 1998-07-14 |