Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11642753 | Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing table | Toshikazu Nomura, Masaki Kinoshita, Nobuyuki Takahashi, Takashi Kishi | 2023-05-09 |
| 11221239 | Substrate processing apparatus and method of detecting indentation formed in substrate | Zhongxin Wen, Nobuyuki Takahashi | 2022-01-11 |
| 10792784 | Leak checking method, and computer-readable storage medium for performing the leak checking method | Nobuyuki Takahashi, Toru Maruyama | 2020-10-06 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa, Keita Yagi +2 more | 2020-02-11 |
| 9922852 | Pressure calibration jig and substrate processing apparatus | Nobuyuki Takahashi, Toru Maruyama | 2018-03-20 |
| 9662761 | Polishing apparatus | Hiroyuki Shinozaki, Nobuyuki Takahashi, Toru Maruyama, Osamu Nabeya | 2017-05-30 |
| 9370852 | Pressure regulator and polishing apparatus having the pressure regulator | Nobuyuki Takahashi, Toru Maruyama | 2016-06-21 |