Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896843 | Wafer holding device and wafer chucking and dechucking method | Fumiaki Sato, Masamitsu Shinozuka | 2021-01-19 |
| 9666413 | Ion implantation apparatus and control method for ion implantation apparatus | Yoshito Fujii, Tetsuya Kudo, Shinji Ebisu, Keiji Okada | 2017-05-30 |
| 7597531 | Method of controlling mover device | Keiji Okada, Michiro Sugitani, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato +2 more | 2009-10-06 |
| 7187143 | Mover device and semiconductor manufacturing apparatus and method | Keiji Okada, Yoshitomo Hidaka, Michiro Sugitani, Junichi Murakami, Fumiaki Sato +2 more | 2007-03-06 |
| 5608223 | Ion implantation device | Frank Sinclair | 1997-03-04 |
| 5525807 | Ion implantation device | Frank Sinclair, Neil Demario | 1996-06-11 |