Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896843 | Wafer holding device and wafer chucking and dechucking method | Fumiaki Sato, Suguru Hirokawa | 2021-01-19 |
| 7597531 | Method of controlling mover device | Keiji Okada, Michiro Sugitani, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato +2 more | 2009-10-06 |
| 7187143 | Mover device and semiconductor manufacturing apparatus and method | Keiji Okada, Yoshitomo Hidaka, Michiro Sugitani, Junichi Murakami, Fumiaki Sato +2 more | 2007-03-06 |
| 6547504 | Wafer carrying system and carrying method thereof | — | 2003-04-15 |