Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468283 | Ion implantation apparatus and method for processing plurality of wafers using the same | Tetsuya Kudo, Yoshito Fujii | 2019-11-05 |
| 9666413 | Ion implantation apparatus and control method for ion implantation apparatus | Yoshito Fujii, Tetsuya Kudo, Suguru Hirokawa, Keiji Okada | 2017-05-30 |