Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835278 | Systems and methods for remote plasma clean | Neil Mackie, Martin L. Zucker | 2004-12-28 |
| 6551447 | Inductive plasma reactor | Stephen E. Savas, Brad S. Mattson, Martin L. Hammond | 2003-04-22 |
| 6143129 | Inductive plasma reactor | Stephen E. Savas, Brad S. Mattson, Martin L. Hammond | 2000-11-07 |
| 5447570 | Purge gas in wafer coating area selection | Johannes Schmitz, Frederick J. Scholz, Norman L. Turner, Raymond L. Chow, Frank O. Uher +1 more | 1995-09-05 |
| 5383971 | Differential pressure CVD chuck | — | 1995-01-24 |
| 5094885 | Differential pressure CVD chuck | — | 1992-03-10 |