SR

Stuart Rounds

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
FS Fusion Systems: 2 patents #17 of 62Top 30%
Overall (All Time): #1,265,504 of 4,157,543Top 35%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6734120 Method of photoresist ash residue removal Ivan L. Berry, III, John Scott Hallock, Michael W. Owens, Mahmoud Dahimene 2004-05-11
6406836 Method of stripping photoresist using re-coating material Robert Douglas Mohondro, Qingyuan Han, Ivan L. Berry, III, Mahmoud Dahimene 2002-06-18
5071485 Method for photoresist stripping using reverse flow John C. Matthews, Robert D. Wooten, David S. Ferris 1991-12-10
4885047 Apparatus for photoresist stripping Michael G. Ury, John C. Matthews 1989-12-05