Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424467 | Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrate | Michael A. Carcasi, Sean Berglund, Ankur Agarwal | 2025-09-23 |
| 12204253 | In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones | Andrew WELOTH, Michael Murphy, Daniel Fulford, David Conklin | 2025-01-21 |
| 12007689 | Apparatus and method for spin processing | Mirko Vukovic | 2024-06-11 |
| 11994807 | In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones | Andrew WELOTH, Michael Murphy, Daniel Fulford, David Conklin | 2024-05-28 |