Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679827 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Gopu Krishna, Ravikumar Patil, Hanish Kumar Panavalappil Kumarankutty, Sonny Kunnakkat | 2020-06-09 |
| 10185313 | Eco-efficiency characterization tool | Mark Denome, Vijayakumar C. Venugopal, Ashish Kumar, Vijai Thangamany, Ching-Hong Hsieh | 2019-01-22 |