Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Xing Lin, Michael D. Willwerth, Konstantin Makhratchev | 2018-04-17 |
| 9580806 | Method of processing a substrate support assembly | Wendell Glen Boyd, Jr., Vijay D. Parkhe | 2017-02-28 |