Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058181 | Method for post-etch cleans | David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Giuseppe Colangelo +2 more | 2011-11-15 |
| 7569492 | Method for post-etch cleans | David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Giuseppe Colangelo +2 more | 2009-08-04 |
| 7390755 | Methods for post etch cleans | David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Giuseppe Colangelo +2 more | 2008-06-24 |
| 6693043 | Method for removing photoresist from low-k films in a downstream plasma system | Helmuth Treichel, Kirk Ostrowski, Chevan Goonetilleke, Jim Su, David Chen | 2004-02-17 |