| 11382412 |
Method and apparatus for cleaning PVA brush |
Jin Goo Park, Jung Hwan Lee |
2022-07-12 |
| 10229841 |
Wafer drying apparatus and wafer drying method |
Masayoshi Imai |
2019-03-12 |
| 8608858 |
Substrate cleaning apparatus and method for determining timing of replacement of cleaning member |
— |
2013-12-17 |
| 6595220 |
Apparatus for conveying a workpiece |
Toshiro Maekawa, Riichiro Aoki, Shoichi Kodama, Hiromi Yajima |
2003-07-22 |
| 6221171 |
Method and apparatus for conveying a workpiece |
Toshiro Maekawa, Riichiro Aoki, Shoichi Kodama, Hiromi Yajima |
2001-04-24 |
| 6106635 |
Washing method and washing apparatus |
Toshiro Maekawa |
2000-08-22 |
| 5966765 |
Cleaning apparatus |
Toshiro Maekawa, Toshiya Takeuchi |
1999-10-19 |
| 5860181 |
Method of and apparatus for cleaning workpiece |
Toshiro Maekawa, Koji Ono, Atsushi Shigeta, Masako Kodera |
1999-01-19 |