Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11668553 | Apparatus and method for controlling edge ring variation | Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more | 2023-06-06 |
| 11209478 | Pulse system verification | Hyun-Ho Doh | 2021-12-28 |
| 10896833 | Methods and apparatus for detecting an endpoint of a seasoning process | Subrahmanyam Venkata Rama Kommisetti, Eda Tuncel, Shayne Smith, Liming Zhang, Ryan Patz | 2021-01-19 |
| 10607815 | Methods and apparatuses for plasma chamber matching and fault identification | Hyun-Ho Doh, Vijayakumar C. Venugopal | 2020-03-31 |
| 10553397 | Processing chamber hardware fault detection using spectral radio frequency analysis | Vijayakumar C. Venugopal, Hyun-Ho Doh | 2020-02-04 |
| 10283320 | Processing chamber hardware fault detection using spectral radio frequency analysis | Vijayakumar C. Venugopal, Hyun-Ho Doh | 2019-05-07 |
| 9934351 | Wafer point by point analysis and data presentation | Dermot Cantwell | 2018-04-03 |