Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Yoshihide Kihara, Maju TOMURA, Kae KUMAGAI | 2025-07-22 |
| 12347651 | Etching method and plasma processing apparatus | Koki Tanaka, Ryu NAGAI, Takatoshi Orui | 2025-07-01 |
| 12341020 | Substrate processing method and substrate processing apparatus | Maju TOMURA | 2025-06-24 |
| 12198938 | Etching method | Takatoshi Orui, Maju TOMURA, Yoshihide Kihara | 2025-01-14 |
| 12142484 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2024-11-12 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Maju TOMURA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |
| 11615964 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-03-28 |
| 11600501 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-03-07 |
| 11551937 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2023-01-10 |
| 11482425 | Etching method and etching apparatus | Maju TOMURA | 2022-10-25 |
| 11456180 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2022-09-27 |
| 11361976 | Substrate processing method and plasma processing apparatus | Maju TOMURA | 2022-06-14 |
| 11342194 | Substrate processing method and substrate processing apparatus | Maju TOMURA | 2022-05-24 |
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Kae KUMAGAI, Maju TOMURA | 2021-11-09 |
| 11094550 | Etching method and etching apparatus | Sho Kumakura | 2021-08-17 |