| 11365476 |
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices |
Praket P. Jha, Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim +2 more |
2022-06-21 |
| 10483282 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-11-19 |
| 10246772 |
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices |
Praket P. Jha, Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim +2 more |
2019-04-02 |
| 10199388 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-02-05 |
| 7824743 |
Deposition processes for titanium nitride barrier and aluminum |
Wei Ti Lee, Yen-Chih Wang, Mohd Fadzli Anwar Hassan, Hyung Chul Park, Ted Guo +1 more |
2010-11-02 |
