| 9267254 |
Flood protection system |
— |
2016-02-23 |
| 7722737 |
Gas distribution system for improved transient phase deposition |
Sudhir Gondhalekar, Robert Duncan, Siamak Salimian, Muhammad M. Rasheed, Harry Whitesell +2 more |
2010-05-25 |
| 6958098 |
Semiconductor wafer support lift-pin assembly |
Thomas Cho, Lily Pang, Michael P. Karazim, Tetsuya Ishikawa |
2005-10-25 |
| 6776875 |
Semiconductor substrate support assembly having lobed o-rings therein |
Thomas Cho, Tetsuya Ishikawa |
2004-08-17 |
| 6572708 |
Semiconductor wafer support lift-pin assembly |
Thomas Cho, Lily Pang, Michael P. Karazim, Tetsuya Ishikawa |
2003-06-03 |
| 6192829 |
Antenna coil assemblies for substrate processing chambers |
Michael P. Karazim, Tetsuya Ishikawa, Thomas Kring, Pavel Staryuk, Abhi Desai +2 more |
2001-02-27 |
| 5558956 |
System for isolating batteries during testing |
Clifford B. Simpson |
1996-09-24 |
