RS

Robert A. Shannon

CY Cymer: 9 patents #53 of 339Top 20%
Overall (All Time): #585,951 of 4,157,543Top 15%
9
Patents All Time

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
6914919 Six to ten KHz, or greater gas discharge laser system Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, R. Kyle Webb +6 more 2005-07-05
6882674 Four KHz gas discharge laser system Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more 2005-04-19
6757316 Four KHz gas discharge laser Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher +14 more 2004-06-29
6466602 Gas discharge laser long life electrodes Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko +4 more 2002-10-15
6144686 Tangential fan with cutoff assembly and vibration control for electric discharge laser Thomas Hofmann, James K. Howey, Richard C. Ujazdowski, Tom A. Watson, R. Kyle Webb 2000-11-07
6061376 Tangential fan for excimer laser Thomas Hofmann, James K. Howey, Richard C. Ujazdowski 2000-05-09
6034978 Gas discharge laser with gas temperature control Richard C. Ujazdowski, Dmitry Berger, William N. Partlo, Tom A. Watson, Paul St. Mark Shadforth Thompson +9 more 2000-03-07
6034984 Tangential fan with cutoff assembly and vibration control for electric discharge laser Thomas Hofmann, James K. Howey, Richard C. Ujazdowski, Tom A. Watson, R. Kyle Webb 2000-03-07
6023486 Soldered fan assembly for electric discharge laser Thomas Hofmann, James K. Howey, Richard C. Ujazdowski 2000-02-08