Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6100184 | Method of making a dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer | Bin Zhao, Prahalad K. Vasudev, Thomas E. Seidel, Peter M. Zeitzoff | 2000-08-08 |
| 6037664 | Dual damascene interconnect structure using low dielectric constant material for an inter-level dielectric layer | Bin Zhao, Prahalad K. Vasudev, Thomas E. Seidel, Peter M. Zeitzoff | 2000-03-14 |
| 4869777 | Method for selectively etching the materials of a composite of two materials | Morris Apschel, Frank D. Egitto, Gad Koren | 1989-09-26 |
| 4830706 | Method of making sloped vias | John R. Susko, Robin A. Susko | 1989-05-16 |
| 4618477 | Uniform plasma for drill smear removal reactor | Suryadevara V. Babu, Neng-Hsing Lu, John A. Welsh | 1986-10-21 |