Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8451440 | Apparatus for the optical inspection of wafers | Kurt Hahn, Gerhard Hoppen, Lambert Danner, Albert Kreh, Wolfgang Vollrath +4 more | 2013-05-28 |
| 7152488 | System operating unit | Karsten Urban, Joachim Wienecke | 2006-12-26 |
| 6473230 | Microscope | — | 2002-10-29 |
| 6236503 | Microscope stand for a wafer inspection microscope | Ulrich Kaczynski | 2001-05-22 |
| 5315080 | Limit switching apparatus with defined overtravel for specimen protection on microscopes with motorized focusing drive | Ulrich Kaczynski | 1994-05-24 |