| 6352244 |
Auxiliary gasline-heating unit in chemical vapor deposition |
Juen-Kuen Lin, Chien-Hsin Lai, Fu-Yang Yu |
2002-03-05 |
| 6322057 |
Auxiliary gasline-heating unit in chemical vapor deposition |
Juen-Kuen Lin, Chien-Hsin Lai, Fu-Yang Yu |
2001-11-27 |
| 6293850 |
Chemical-mechanical polish machines and fabrication process using the same |
Juen-Kuen Lin, Chien-Hsin Lai, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-09-25 |
| 6280079 |
Method of mixing slurries |
Ming-Sheng Yang, Chia-Jui Chang, Juan-Yuan Wu |
2001-08-28 |
| 6241582 |
Chemical mechanical polish machines and fabrication process using the same |
Juen-Kuen Lin, Chien-Hsin Lai, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-06-05 |
| 6234876 |
Chemical-mechanical polish machines and fabrication process using the same |
Juen-Kuen Lin, Chien-Hsin Lai, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-05-22 |
| 6220930 |
Wafer polishing head |
Juen-Kuen Lin, Chien-Hsin Lai, Chia-Jui Chang |
2001-04-24 |
| 6206758 |
Method for increasing working life of retaining ring in chemical-mechanical polishing machine |
Chien-Hsin Lai, Juen-Kuen Lin |
2001-03-27 |
| 6183350 |
Chemical-mechanical polish machines and fabrication process using the same |
Juen-Kuen Lin, Chien-Hsin Lai, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-02-06 |
| 6165255 |
Chemical-liquid controlling apparatus |
Chien-Hsin Lai, Li-Min Chang, Fu-Yang Yu |
2000-12-26 |
| 6119294 |
Cleaning system with automatically controlled brush pressure |
Chien-Hsin Lai, Juen-Kuen Lin, Kun-Lin Wu |
2000-09-19 |
| 6120366 |
Chemical-mechanical polishing pad |
Juen-Kuen Lin, Chien-Hsin Lai, Edward S. Yang, Kun-Lin Wu, Fu-Yang Yu |
2000-09-19 |
| 6106714 |
Filtering apparatus with stirrer in a CMP apparatus |
Hao-Kuang Chiu |
2000-08-22 |
| 6096162 |
Chemical mechanical polishing machine |
Juen-Kuen Lin, Chien-Hsin Lai, Chia-Jui Chang |
2000-08-01 |
| 6062963 |
Retainer ring design for polishing head of chemical-mechanical polishing machine |
Juen-Kuen Lin, Chien-Hsin Lai, Hao-Kuang Chiu, Kun-Lin Wu |
2000-05-16 |
| 6051139 |
Device for filtering slurry |
Juen-Kuen Lin, Chien-Hsin Lai |
2000-04-18 |
| 5993647 |
Circulation system of slurry |
Chao Yuan Huang, Juan-Yuan Wu |
1999-11-30 |
| 5944593 |
Retainer ring for polishing head of chemical-mechanical polish machines |
Daniel T. Chiu, C.S. Yang, J. Y. Wu, J. S. Lai |
1999-08-31 |