Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514014 | High density plasma chemical vapor deposition process | Chih-Chien Liu, Ta-Shan Tseng, W.B. Shieh, Water Lur, Shih-Wei Sun | 2009-04-07 |
| 6100205 | Intermetal dielectric layer formation with low dielectric constant using high density plasma chemical vapor deposition process | Chih-Chien Liu, Tsang-Jung Lin, Water Lur, Shih-Wei Sun | 2000-08-08 |
| 5968610 | Multi-step high density plasma chemical vapor deposition process | Chih-Chien Liu, Kuen-Jian Chen, Yu-Hao Chen, Water Lur, Shih-Wei Sun | 1999-10-19 |
| 5944593 | Retainer ring for polishing head of chemical-mechanical polish machines | Daniel T. Chiu, C.S. Yang, Peng-Yih Peng, J. S. Lai | 1999-08-31 |
| 5517062 | Stress released VLSI structure by the formation of porous intermetal layer | Water Lur | 1996-05-14 |
| 5393709 | Method of making stress released VLSI structure by the formation of porous intermetal layer | Water Lur | 1995-02-28 |
| 5358733 | Stress release metallization for VLSI circuits | Water Lur | 1994-10-25 |
| 5292680 | Method of forming a convex charge coupled device | Water Lur, Jenn-Tarng Lin | 1994-03-08 |
| 5254495 | Salicide recessed local oxidation of silicon | Water Lur | 1993-10-19 |