Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more | 2021-08-10 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more | 2021-04-06 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Nir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens | 2016-08-30 |
| 8322963 | End effector for a cluster tool | Jeffrey C. Hudgens, Jagan Rangarajan, Michael R. Rice | 2012-12-04 |
| 8225496 | Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated | Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more | 2012-07-24 |
| 7694688 | Wet clean system design | Paul Lester, Scott Meyer, Wyland L. Atkins, Douglas Richards, Constantin Predoaica +6 more | 2010-04-13 |