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Electron beam proximity exposure apparatus and mask unit therefor |
Takao Utsumi |
2005-05-17 |
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Electron beam proximity exposure apparatus and method |
Takao Utsumi |
2004-04-27 |
| 6703623 |
Electron beam proximity exposure apparatus |
Takao Utsumi |
2004-03-09 |
| 6444374 |
Manufacturing method of mask for electron beam proximity exposure and mask |
Takao Utsumi |
2002-09-03 |
| 5097204 |
Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam |
Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Minpei Fujinami |
1992-03-17 |
| 5041732 |
Charged particle beam generating apparatus |
Kenichi Saito, Hirofumi Morita |
1991-08-20 |
| 5006795 |
Charged beam radiation apparatus |
Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Minpei Fujinami |
1991-04-09 |
| 4980639 |
Method and apparatus for testing integrated electronic device |
Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Minpei Fujinami |
1990-12-25 |
| 4851768 |
Characteristic test apparatus for electronic device and method for using the same |
Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Minpei Fujinami |
1989-07-25 |
| 4443703 |
Method and apparatus of deflection calibration for a charged particle beam exposure apparatus |
Tsuneo Okubo, Norio Saitou, Susumu Ozasa |
1984-04-17 |