Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5097204 | Method and apparatus for evaluating the capacitance of an integrated electronic device using an E beam | Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Nobuo Shimazu | 1992-03-17 |
| 5006795 | Charged beam radiation apparatus | Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Nobuo Shimazu | 1991-04-09 |
| 4980639 | Method and apparatus for testing integrated electronic device | Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Nobuo Shimazu | 1990-12-25 |
| 4851768 | Characteristic test apparatus for electronic device and method for using the same | Masahiro Yoshizawa, Akira Kikuchi, Kou Wada, Nobuo Shimazu | 1989-07-25 |
| 4692579 | Electron beam lithography apparatus | Norio Saitou, Susumu Ozasa, Masahide Okumura, Mitsuo Ooyama, Tsutomu Komoda +2 more | 1987-09-08 |
| 4589773 | Position detecting system | Satoshi Ido, Yasuo Kato, Yoshio Sakitani, Susumu Ozasa | 1986-05-20 |
| 4197486 | Control system for deflecting an electron beam | Atsushi Iwata, Akinori Shibayama, Norio Yokozawa, Kenji Maio, Kenji Fujikata | 1980-04-08 |