Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950441 | Low energy e-beam contact printing lithography | — | 2021-03-16 |
| 9557658 | Low energy electron beam lithography | — | 2017-01-31 |
| 6894295 | Electron beam proximity exposure apparatus and mask unit therefor | Nobuo Shimazu | 2005-05-17 |
| 6727507 | Electron beam proximity exposure apparatus and method | Nobuo Shimazu | 2004-04-27 |
| 6717157 | Mask inspecting apparatus | — | 2004-04-06 |
| 6703623 | Electron beam proximity exposure apparatus | Nobuo Shimazu | 2004-03-09 |
| 6444374 | Manufacturing method of mask for electron beam proximity exposure and mask | Nobuo Shimazu | 2002-09-03 |
| 5831272 | Low energy electron beam lithography | — | 1998-11-03 |