| 12051574 |
Wafer processing method and plasma processing apparatus |
Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Soichiro Eto, Shigeru Nakamoto +1 more |
2024-07-30 |
| 11915951 |
Plasma processing method |
Hiroyuki Kobayashi, Kazunori Shinoda, Tatehito Usui, Naoyuki Kofuji, Yutaka Kouzuma +4 more |
2024-02-27 |
| 11557463 |
Vacuum processing apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more |
2023-01-17 |
| 11276579 |
Substrate processing method and plasma processing apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Yutaka Kouzuma, Masaru Izawa |
2022-03-15 |
| 10937635 |
Vacuum processing apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more |
2021-03-02 |
| 10872779 |
Plasma etching method and plasma etching apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Kazumasa Ookuma, Yutaka Kouzuma +1 more |
2020-12-22 |
| D901407 |
Integrated type ion shield for semiconductor manufacturing apparatus |
Yutaka Kouzuma, Michiaki Kobayashi, Kazuyuki Hirozane, Kohei Kawamura, Hiroyuki Kobayashi |
2020-11-10 |
| D900760 |
Ion shield plate for semiconductor manufacturing apparatus |
Yutaka Kouzuma, Michiaki Kobayashi, Kazuyuki Hirozane, Kohei Kawamura, Hiroyuki Kobayashi |
2020-11-03 |
| 10418254 |
Etching method and etching apparatus |
Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Kohei Kawamura, Masaru Izawa +2 more |
2019-09-17 |
| 10325781 |
Etching method and etching apparatus |
Kazunori Shinoda, Satoshi Sakai, Masaru Izawa, Hiroyuki Kobayashi, Yutaka Kouzuma +2 more |
2019-06-18 |
| 10290472 |
Vacuum processing apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Yutaka Kouzuma, Satoshi Sakai +1 more |
2019-05-14 |
| 10192720 |
Plasma processing apparatus |
Hiroyuki Kobayashi, Kazunori Shinoda, Kenji Maeda, Satoshi Sakai, Masaru Izawa |
2019-01-29 |
| 10141207 |
Operation method of plasma processing apparatus |
Yutaka Kouzuma, Hiroyuki Kobayashi, Kenetsu Yokogawa, Tomoyuki Watanabe |
2018-11-27 |