Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10215123 | Engine controlling apparatus | Akihiro Tsuchiya, Kensuke Kondo, Yuji Sato | 2019-02-26 |
| 9964061 | Engine controlling apparatus | Akihiro Tsuchiya, Kensuke Kondo, Yuji Sato | 2018-05-08 |
| 8010228 | Process monitoring apparatus and method for monitoring process | — | 2011-08-30 |
| 7303928 | Process monitor and system for producing semiconductor | — | 2007-12-04 |
| 7237606 | Wafer supporter | Keiichi Enjoji, Koji Homma | 2007-07-03 |
| 7180425 | Drop detection device or abnormality detection device and portable apparatus equipped with said device | — | 2007-02-20 |
| 7112926 | Matching unit and plasma processing system | Shinji Himori, Kazuyoshi Watanabe, Jun'ichi Shimada | 2006-09-26 |
| 7101797 | Substrate processing device and processing method | — | 2006-09-05 |
| 7072798 | Semiconductor fabricating apparatus | — | 2006-07-04 |
| 7029801 | Method of manufacturing mask for electron beam lithography and mask blank for electron beam lithography | — | 2006-04-18 |
| 6737812 | Plasma processing apparatus | Koji Homma | 2004-05-18 |
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Toshiaki Hongoh | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Toshiaki Hongoh | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Tetsu Oosawa, Satoru Kawakami | 2002-03-19 |