Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745328 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Dian Sugiarto, Chi-I Lang, Peter Wai-Man Lee, Li-Qun Xia | 2010-06-29 |
| 7465659 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Dian Sugiarto, Chi-I Lang, Peter Wai-Man Lee, Li-Qun Xia | 2008-12-16 |
| 7157384 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Dian Sugiarto, Chi-I Lang, Peter Wai-Man Lee, Li-Qun Xia | 2007-01-02 |
| 6838393 | Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide | Kang Sub Yim, Dian Sugiarto, Chi-I Lang, Peter Wai-Man Lee, Li-Qun Xia | 2005-01-04 |