Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983427 | Method for manufacturing a mask blank substrate, method for manufacturing a mask blank, method for manufacturing a transfer mask, method for manufacturing a semiconductor device, a mask blank substrate, a mask blank, and a transfer mask | — | 2021-04-20 |
| 10578961 | Mask blank substrate, multi-layer reflective film coated substrate, and mask blank | Yohei IKEBE | 2020-03-03 |
| 10168613 | Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device | — | 2019-01-01 |
| 9690189 | Mask blank substrate, mask blank, transfer mask, and method of manufacturing semiconductor device | — | 2017-06-27 |
| 8785085 | Method of manufacturing a mask blank substrate, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | — | 2014-07-22 |
| 8709683 | Photomask blank, photomask blank manufacturing method, and photomask manufacturing method | — | 2014-04-29 |
| 8609307 | Thin film evaluation method, mask blank, and transfer mask | Kazuya Sakai | 2013-12-17 |
| 8609304 | Method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hideaki Mitsui, Naoki Nishida, Satoshi Iwashita | 2013-12-17 |
| 8592106 | Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device | — | 2013-11-26 |
| 8455158 | Method of manufacturing a substrate for a mask blank, method of manufacturing a mask blank, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | — | 2013-06-04 |
| 8450030 | Thin film evaluation method, mask blank, and transfer mask | Kazuya Sakai | 2013-05-28 |
| 8440373 | Mask blank substrate, mask blank, photomask, and methods of manufacturing the same | — | 2013-05-14 |
| 8318388 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Atsushi Kawaguchi, Naozumi Ishibashi | 2012-11-27 |
| 8318387 | Mask blank substrate set and mask blank set | — | 2012-11-27 |
| 8197992 | Photomask blank, photomask blank manufacturing method, and photomask manufacturing method | — | 2012-06-12 |
| 8142963 | Methods of manufacturing a mask blank substrate, a mask blank, a photomask, and a semiconductor device | — | 2012-03-27 |
| 8107063 | Transparent article | — | 2012-01-31 |
| 8048593 | Mask blank substrate, mask blank, photomask, and methods of manufacturing the same | — | 2011-11-01 |
| 8039178 | Manufacturing method of transparent substrate for mask blanks, manufacturing method of mask blanks, manufacturing method of exposure masks, manufacturing method of semiconductor devices, manufacturing method of liquid crystal display devices, and defect correction method of exposure masks | Masaru Mitsui | 2011-10-18 |
| 8026025 | Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method | — | 2011-09-27 |
| 8007961 | Mask blank substrate set and mask blank set | — | 2011-08-30 |
| 7998644 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Atsushi Kawaguchi, Naozumi Ishibashi | 2011-08-16 |
| 7972702 | Defect inspection method for a glass substrate for a mask blank, glass substrate for a mask blank, mask blank, exposure mask, method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing an exposure mask | — | 2011-07-05 |
| 7901840 | Mask blank transparent substrate manufacturing method, mask blank manufacturing method, and exposure mask manufacturing method | — | 2011-03-08 |
| 7898650 | Inspection method for transparent article | — | 2011-03-01 |