Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8318388 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Masaru Tanabe, Atsushi Kawaguchi, Naozumi Ishibashi | 2012-11-27 |
| 7998644 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Masaru Tanabe, Atsushi Kawaguchi, Naozumi Ishibashi | 2011-08-16 |
| 7892708 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Masaru Tanabe, Atsushi Kawaguchi, Akihiro Kawahara | 2011-02-22 |
| 7745074 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Masaru Tanabe, Atsushi Kawaguchi, Akihiro Kawahara | 2010-06-29 |
| 7700244 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Masaru Tanabe, Atsushi Kawaguchi, Naozumi Ishibashi | 2010-04-20 |
| 7592104 | Mask blank substrate, mask blank, exposure mask, mask blank substrate manufacturing method, and semiconductor manufacturing method | Masaru Tanabe, Atsushi Kawaguchi, Akihiro Kawahara | 2009-09-22 |
| 7579120 | Substrate for reticle and method of manufacturing the substrate, and mask blank and method of manufacturing the mask blank | — | 2009-08-25 |