Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8318388 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Masaru Tanabe, Atsushi Kawaguchi | 2012-11-27 |
| 7998644 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Masaru Tanabe, Atsushi Kawaguchi | 2011-08-16 |
| 7700244 | Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method | Osamu Suzuki, Hiroyuki Akagawa, Masaru Tanabe, Atsushi Kawaguchi | 2010-04-20 |