MP

Matthew Panzer

KL Kla-Tencor: 10 patents #144 of 1,394Top 15%
KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #453,113 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10976025 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine, Jincheng Wang +3 more 2021-04-13
10616987 System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filter Wei Zhao, Kenneth P. Gross, Ilya Bezel 2020-04-07
10522340 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Ilya Bezel 2019-12-31
10520741 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Ilya Bezel, Eugene Shifrin 2019-12-31
10381216 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin 2019-08-13
10283342 Laser sustained plasma light source with graded absorption features Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Anant Chimmalgi, Lauren Wilson +1 more 2019-05-07
10217625 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin 2019-02-26
10032620 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Ilya Bezel 2018-07-24
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine, Jincheng Wang +3 more 2018-03-27
9709811 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Ilya Bezel, Eugene Shifrin 2017-07-18
8796652 Laser sustained plasma bulb including water Ilya Bezel, Anatoly Shchemelinin 2014-08-05