| 12410521 |
Bidirectional indexing apparatus |
Adriana Vintila |
2025-09-09 |
| 12338531 |
Spatially tunable deposition to compensate within wafer differential bow |
Fayaz Shaikh, Adriana Vintila, Nick Ray Linebarger, Jr., Xin Yin, James Lee +1 more |
2025-06-24 |
| 12215804 |
Cooling of air actuated valve using actuating air |
Adriana Vintila |
2025-02-04 |
| 11946142 |
Spatially tunable deposition to compensate within wafer differential bow |
Fayaz Shaikh, Adriana Vintila, Nick Ray Linebarger, Jr., Xin Yin, James Lee +1 more |
2024-04-02 |
| 10354857 |
High power low pressure UV bulb with plasma resistant coating |
Xiaolan Chen, Curtis Bailey, Stephen Yu-Hong Lau, Mitchell Lamar |
2019-07-16 |
| 10161034 |
Rapid chamber clean using concurrent in-situ and remote plasma sources |
Keith Fox, Jonathan Church, James Lee, Kevin Gerber |
2018-12-25 |
| 10147597 |
Turbulent flow spiral multi-zone precursor vaporizer |
James Lee, Mitchell Lamar, Mathew Joseph Weissinger, Damodar Rajaram Shanbhag |
2018-12-04 |
